{"id":244,"date":"2025-06-12T14:04:15","date_gmt":"2025-06-12T06:04:15","guid":{"rendered":"https:\/\/www.bihec.com\/sens4as\/?p=244"},"modified":"2025-06-12T14:04:15","modified_gmt":"2025-06-12T06:04:15","slug":"sens4%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8%e3%80%81%e7%9c%9f%e7%a9%ba%e8%ae%a1%e5%92%8c%e6%8e%a7%e5%88%b6%e5%99%a8vdm-7-dicap-vpm-7-smartpirani-atm-%e4%bc%a0%e6%84%9f","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/sens4as\/sens4%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8%e3%80%81%e7%9c%9f%e7%a9%ba%e8%ae%a1%e5%92%8c%e6%8e%a7%e5%88%b6%e5%99%a8vdm-7-dicap-vpm-7-smartpirani-atm-%e4%bc%a0%e6%84%9f\/","title":{"rendered":"SENS4\u771f\u7a7a\u4f20\u611f\u5668\u3001\u771f\u7a7a\u8ba1\u548c\u63a7\u5236\u5668|VDM-7 DiCAP™ VPM-7 SmartPirani™ ATM\u00a0\u4f20\u611f\u5668\u4e13\u4e3a\u534a\u5bfc\u4f53\u8d1f\u8f7d\u9501\u5b9a\u3001\u7cbe\u5bc6\u538b\u529b\u63a7\u5236\u548c\u5176\u4ed6\u771f\u7a7a\u5e94\u7528"},"content":{"rendered":"
\u65e0\u8bba\u60a8\u662f\u9700\u8981\u7528\u4e8e\u5de5\u4e1a\u6d41\u7a0b\u3001\u7814\u7a76\u5b9e\u9a8c\u5ba4\u8fd8\u662f\u4e13\u4e1a\u9ad8\u79d1\u6280\u5e94\u7528\u7684\u9ad8\u7cbe\u5ea6\u771f\u7a7a\u4f20\u611f\u5668\uff0c\u6211\u4eec\u7684\u9009\u62e9\u5de5\u5177\u90fd\u53ef\u4ee5\u5e2e\u52a9\u60a8\u901a\u8fc7\u771f\u7a7a\u4f20\u611f\u5668\u7c7b\u578b\u3001\u538b\u529b\u8303\u56f4\u548c\u63a5\u53e3\u786e\u5b9a\u6700\u4f73\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n
\u4ece\u5168\u7cfb\u5217\u7684\u6570\u5b57\u771f\u7a7a\u8ba1<\/a>\u3001\u771f\u7a7a\u4f20\u611f\u5668\u548c\u771f\u7a7a\u63a7\u5236\u5668<\/a>\u4e2d\u8fdb\u884c\u9009\u62e9\uff0c\u6839\u636e\u60a8\u7684\u786e\u5207\u89c4\u683c\uff08\u5305\u62ec\u8fde\u63a5\u7c7b\u578b\u3001\u8f93\u51fa\u4fe1\u53f7\u548c\u7cbe\u5ea6\u8981\u6c42\uff09\u8fdb\u884c\u5b9a\u5236\u3002Sens4<\/a> \u63d0\u4f9b\u53ef\u9760\u8010\u7528\u7684\u771f\u7a7a\u6d4b\u91cf\u89e3\u51b3\u65b9\u6848\uff0c\u4e13\u4e3a\u5728\u82db\u523b\u7684\u73af\u5883\u4e2d\u8fd0\u884c\u800c\u8bbe\u8ba1<\/p>\n VPM-7 SmartPirani™ ATM<\/strong>\u00a0\u4f20\u611f\u5668\u4e13\u4e3a\u534a\u5bfc\u4f53\u8d1f\u8f7d\u9501\u5b9a\u3001\u7cbe\u5bc6\u538b\u529b\u63a7\u5236\u548c\u5176\u4ed6\u771f\u7a7a\u5e94\u7528\u800c\u8bbe\u8ba1\uff0c\u5728\u8fd9\u4e9b\u5e94\u7528\u4e2d\uff0c\u76f8\u5bf9\u4e8e\u5927\u6c14\u73af\u5883\u538b\u529b\u7684\u7cbe\u786e\u538b\u529b\u6d4b\u91cf\u975e\u5e38\u91cd\u8981\u3002<\/p>\n \u4e0e\u4f20\u7edf\u7684\u8d1f\u8f7d\u9501\u5b9a<\/strong>\u4f20\u611f\u5668\u548c\u5176\u4ed6\u8d1f\u8f7d\u9501\u5b9a\u4f20\u611f\u5668<\/a>\u89e3\u51b3\u65b9\u6848\u76f8\u6bd4\uff0c\u5b83\u5177\u6709\u4e00\u6d41\u7684\u6027\u80fd\uff0c\u5177\u6709\u66f4\u5bbd\u7684\u6d4b\u91cf\u8303\u56f4\u3001\u66f4\u9ad8\u7684\u7cbe\u5ea6\u3001\u66f4\u5feb\u7684\u6d4b\u91cf\u5468\u671f\u3002<\/p>\n SmartPirani™\u00a0ATM \u901a\u8fc7\u5c06\u70ed\u5bfc\u7387\u76ae\u62c9\u5c3c\u70ed\u635f\u5931\u771f\u7a7a\u8ba1<\/a>\u7684\u53ef\u7528\u6d4b\u91cf\u8303\u56f4\u5ef6\u957f\u4e86 1-3 \u4e2a\u6570\u91cf\u7ea7<\/a>\uff0c\u786e\u7acb\u4e86\u65b0\u6807\u51c6\u3002<\/p>\n VPM-7 \u662f\u4e00\u6b3e\u771f\u6b63\u7684\u591a\u4f20\u611f\u5668\u4f20\u611f\u5668\uff0c\u5177\u6709\u56db\u4e2a\u538b\u529b\u8f93\u51fa\uff1a\u4e00\u4e2a\u6c14\u538b\u73af\u5883\u4f20\u611f\u5668\u3001\u4e00\u4e2a\u5bbd\u8303\u56f4\u70ed\u635f\u5931\u76ae\u62c9\u5c3c\u4f20\u611f\u5668\u3001\u4e00\u4e2a\u7edd\u5bf9\u5f0f\u9694\u819c\u4f20\u611f\u5668\u548c\u4e00\u4e2a\u76f8\u5bf9\u4e8e\u5927\u6c14\u538b\u7684\u4fe1\u53f7\uff0c\u6240\u6709\u8fd9\u4e9b\u4f20\u611f\u5668\u5171\u540c\u4f5c\u7528\uff0c\u4ee5\u4f18\u5316\u73b0\u4ee3\u8d1f\u8f7d\u9501\u5b9a\u771f\u7a7a\u5ba4\u4e2d\u7684\u7cbe\u786e\u538b\u529b\u63a7\u5236\u3002\u9694\u819c\u4f20\u611f\u5668\u63d0\u4f9b 2 \u81f3 1333 mbar\uff081.5 \u81f3 1000 Torr\uff09\u7684\u7cbe\u786e\u7edd\u538b\u8bfb\u6570\u3002<\/p>\n Load-lock \u662f\u4e00\u79cd\u771f\u7a7a\u5ba4\uff0c\u7528\u4e8e\u5c06\u5668\u4ef6\uff08\u5982\u534a\u5bfc\u4f53\u6676\u7247\uff09\u4ece\u73af\u5883\u6c14\u538b\u52a0\u8f7d\u5230\u771f\u7a7a\u52a0\u5de5\u5ba4\u4e2d\u3002\u8d1f\u8f7d\u9501\u5b9a\u901a\u5e38\u5728\u5927\u6c14\u538b\u548c\u5c06\u6676\u5706\u8f6c\u79fb\u5230\u5904\u7406\u5ba4\u6240\u9700\u7684\u9002\u5f53\u771f\u7a7a\u5ea6\u4e4b\u95f4\u5faa\u73af\u3002\u8d1f\u8f7d\u9501\u5185\u7684\u7cbe\u786e\u538b\u529b\u63a7\u5236\u5bf9\u4e8e\u9632\u6b62\u73af\u5883\u7a7a\u6c14\u548c\u9897\u7c92\u7269\u7684\u6c61\u67d3\u3001\u4fdd\u62a4\u8154\u5ba4\u548c\u6676\u5706\u81f3\u5173\u91cd\u8981\u3002<\/span><\/p>\n<\/section>\n VPM-7 SmartPirani™ ATM \u4e13\u4e3a\u4e00\u6d41\u7684\u771f\u7a7a\u6c14\u4f53\u538b\u529b\u6d4b\u91cf\u548c\u63a7\u5236\u800c\u8bbe\u8ba1\u3002\u591a\u4e2a\u8f93\u51fa\u9009\u9879\u63d0\u4f9b\u7684\u4e0d\u4ec5\u4ec5\u662f\u538b\u529b\u6d4b\u91cf\u4fe1\u53f7\u3002<\/p>\n \u4e09\u4e2a\u72ec\u7acb\u7684\u56fa\u6001\u5f00\u5173\u7ee7\u7535\u5668<\/a>\u5141\u8bb8\u5bf9\u8d1f\u8f7d\u9501\u5b9a\u538b\u529b\u5faa\u73af\u8fdb\u884c\u5916\u90e8\u63a7\u5236\uff0c\u5305\u62ec\u6cf5\u3001\u9600\u95e8\u3001\u5b89\u5168\u8054\u9501\u7535\u8def<\/a>\u3001PLC \u548c\u5176\u4ed6\u8bbe\u5907\u3002<\/p>\n \u4e0e\u673a\u7535\u7ee7\u7535\u5668\u4e0d\u540c\uff0c\u56fa\u6001\u7ee7\u7535\u5668\u5177\u6709\u66f4\u9ad8\u7684\u53ef\u9760\u6027\u548c\u66f4\u5feb\u7684\u5f00\u5173\u65f6\u95f4\uff0c\u5177\u6709\u65e0\u7535\u5f27\u89e6\u70b9\uff0c\u5e76\u4e14\u5728\u5f00\u5173\u8fc7\u7a0b\u4e2d\u4e0d\u4f1a\u4ea7\u751f EMI\uff08\u7535\u78c1\u5e72\u6270\uff09\u3002<\/p>\n SmartPirani™ ATM \u7ee7\u7535\u5668\u7ecf\u4e45\u8010\u7528\uff0c\u7ecf\u8fc7 UL \u8ba4\u8bc1\u3001CSA \u8ba4\u53ef\u548c EN\/IEC 60950-1 \u8ba4\u8bc1\uff0c\u786e\u4fdd\u5728\u5173\u952e\u771f\u7a7a\u8fc7\u7a0b\u548c\u9ad8\u5faa\u73af\u5e94\u7528\u4e2d\u63d0\u4f9b\u53ef\u9760\u7684\u6027\u80fd\u3002<\/p>\n <\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/section>\n \u6a21\u62df\u8f93\u51fa\u7535\u538b\u4e3a\u5916\u90e8\u76d1\u63a7\u6216\u63a7\u5236\u63d0\u4f9b\u4fe1\u53f7\u3002VPM-7 \u4e3a mbar\u3001Torr \u6216 Pascal \u63d0\u4f9b\u6bcf\u5341\u500d\u9891\u7a0b 1 VDC \u7684\u6807\u51c6\u7535\u538b\u8f93\u51fa\u3002<\/p>\n \u6b64\u5916\uff0c\u5b83\u53ef\u4ee5\u7531\u7528\u6237\u914d\u7f6e\u6216\u9884\u914d\u7f6e\u5404\u79cd\u5176\u4ed6\u6a21\u62df\u8f93\u51fa\u9009\u9879\uff0c\u4ece\u800c\u53ef\u4ee5\u65e0\u7f1d\u66ff\u6362\u5176\u4ed6\u5236\u9020\u5546\u7684\u4eea\u8868\u3002<\/p>\n <\/p>\n<\/div>\n RS-232<\/a> \u548c RS-485 \u4e32\u884c\u63a5\u53e3\u6709\u52a9\u4e8e\u5c06\u538b\u529b\u548c\u6e29\u5ea6\u6d4b\u91cf\u6570\u636e\u4f20\u8f93\u5230\u5916\u90e8\u8bbe\u5907\u3002<\/p>\n \u8be5\u6570\u5b57\u63a5\u53e3\u652f\u6301\u8bca\u65ad\u3001\u9884\u6d4b\u6027\u7ef4\u62a4\u3001\u7ef4\u4fee\u3001\u6821\u51c6\u3001\u8bbe\u5b9a\u70b9\u914d\u7f6e\u3001\u6a21\u62df\u8f93\u51fa\u7f29\u653e\u4ee5\u53ca\u771f\u7a7a\u538b\u529b\u6d4b\u91cf\u503c\u7684\u5b9e\u65f6\u91c7\u96c6\uff0c\u4ee5\u5b9e\u73b0\u5c4f\u5e55\u53ef\u89c6\u5316\u3002<\/p>\n <\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/section>\n \u901a\u5e38\uff0c\u8d1f\u8f7d\u9501\u5b9a\u88c5\u7f6e\u662f\u6e05\u6d01\u4e14\u65e0\u8150\u8680\u6027\u6c14\u4f53\u7684\u3002\u7136\u800c\uff0c\u53ef\u9009\u7684\u8010\u8150\u8680<\/a>\u4f20\u611f\u5668\u4f7f VPM-7 SmartPirani™ ATM \u80fd\u591f\u5728\u5b58\u5728\u8150\u8680\u6027\u5316\u5b66\u54c1\u6216\u6b8b\u7559\u8680\u523b\u6c14\u4f53\u7684\u5e94\u7528\u4e2d\u4f7f\u7528\u3002<\/p>\n \u9676\u74f7\u662f\u4e00\u79cd\u9ad8\u5ea6\u8010\u8150\u8680\u7684\u6750\u6599\uff0c\u5e38\u7528\u4e8e\u7535\u5bb9\u5f0f\u9694\u819c\u8868\u7684\u771f\u7a7a\u4f20\u611f\u5668\u9694\u819c\u3002<\/p>\n \u805a\u5bf9\u4e8c\u7532\u82ef\u662f\u4e00\u79cd\u72ec\u7279\u7684\u805a\u5408\u7269\uff0c\u4ee5\u5176\u5f3a\u5927\u7684\u8010\u8150\u8680\u6027\u548c\u758f\u6c34\u6027\u800c\u95fb\u540d\u3002<\/p>\n <\/p>\n<\/div>\n VPM-7 SmartPirani™ ATM \u4f20\u611f\u5668\u53ef\u4f5c\u4e3a\u4f20\u7edf\u8d1f\u8f7d\u9501\u5b9a\u771f\u7a7a\u4f20\u611f\u5668\u7684\u76f4\u63a5\u66ff\u4ee3\u54c1\u3002<\/p>\n \u5f15\u811a\u517c\u5bb9\u6027\u3001\u6a21\u62df\u7535\u538b\u3001\u538b\u529b\u4fe1\u53f7\u4eff\u771f\u4ee5\u53ca\u4e0e\u5176\u4ed6\u4f9b\u5e94\u5546\u7684\u771f\u7a7a\u4f20\u611f\u5668\u548c\u53d8\u9001\u5668\u7684\u6570\u5b57\u534f\u8bae\u4eff\u771f\u3002<\/p>\n \u8fd9\u4e9b\u4eff\u771f\u529f\u80fd\u652f\u6301\u5bf9\u4f20\u7edf\u76ae\u62c9\u5c3c\u91d1\u5c5e\u4e1d\u4f20\u611f\u5668\u3001\u5bf9\u6d41\u8ba1\u548c\u4f20\u7edf\u5fae\u578b\u76ae\u62c9\u5c3c\u4f20\u611f\u5668\u8fdb\u884c\u5feb\u901f\u3001\u65e0\u7f1d\u5347\u7ea7\uff0c\u65e0\u9700\u66f4\u6362\u5e03\u7ebf\u548c\u7cfb\u7edf\u8bbe\u5907\u8f6f\u4ef6\u5373\u53ef\u8fc7\u6e21\u5230\u4e0b\u4e00\u4ee3\u771f\u7a7a\u4f20\u611f\u5668\u3002<\/p>\n VPM-7 SmartPirani™ ATM \u5728\u53d6\u4ee3\u4f20\u7edf\u7684\u8d1f\u8f7d\u9501\u5b9a\u771f\u7a7a\u8ba1\u548c\u4f20\u611f\u5668\u65f6\uff0c\u53ef\u5728\u8bb8\u591a\u5e94\u7528\u4e2d\u964d\u4f4e\u6210\u672c\u5e76\u589e\u5f3a\u6d4b\u91cf\u6027\u80fd\u3002<\/p>\n <\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/section>\n VPM-7 SmartPirani™ ATM \u4f20\u611f\u5668\u53ef\u4ee5\u5b9a\u5236\u4ee5\u6ee1\u8db3\u7279\u5b9a\u7684\u5e94\u7528\u8981\u6c42\uff0c\u4f7f\u5176\u80fd\u591f\u7acb\u5373\u5728\u7279\u5b9a\u7684\u8bbe\u5907\u8bbe\u7f6e\u4e2d\u4f7f\u7528\u3002\u9884\u914d\u7f6e\u9009\u9879\u5305\u62ec\u6d4b\u91cf\u8303\u56f4\u3001\u771f\u7a7a\u538b\u529b\u5355\u4f4d\u3001\u8bbe\u5b9a\u70b9\u914d\u7f6e\u548c\u8f93\u51fa\u4fe1\u53f7\u7f29\u653e\u3002<\/p>\n \u5b9a\u5236\u5355\u5143\u88ab\u5206\u914d\u4e00\u4e2a\u552f\u4e00\u7684\u96f6\u4ef6\u7f16\u53f7\uff0c\u4ee5\u4fbf\u5c06\u6765\u8f7b\u677e\u91cd\u65b0\u8ba2\u8d2d\u3002<\/p>\n <\/p>\n<\/section>\n VPM-7 SmartPirani™ ATM \u4e13\u4e3a\u9ad8\u7ea7\u771f\u7a7a\u8fc7\u7a0b\u7684\u53ef\u9760\u6d4b\u91cf\u548c\u63a7\u5236\u800c\u8bbe\u8ba1\uff0c\u9002\u7528\u4e8e\u8d1f\u8f7d\u9501\u5b9a\u7cfb\u7edf\u7684\u538b\u529b\u63a7\u5236\u3002VPM-7 \u914d\u7f6e\u6709\u591a\u79cd\u9009\u62e9\uff0c\u53ef\u6ee1\u8db3\u5404\u79cd\u884c\u4e1a\u548c\u5e94\u7528\u7684\u4e0d\u540c\u8981\u6c42\u3002<\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/section>\n SENS4\u771f\u7a7a\u4f20\u611f\u5668\u3001\u771f\u7a7a\u8ba1\u548c\u63a7\u5236\u5668|VDM-7 DiCAP™ VPM-7 SmartPirani™ ATM\u00a0\u4f20\u611f\u5668\u4e13\u4e3a\u534a\u5bfc\u4f53\u8d1f\u8f7d\u9501\u5b9a\u3001\u7cbe\u5bc6\u538b\u529b\u63a7\u5236\u548c\u5176 <\/p>\n","protected":false},"author":36,"featured_media":245,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[89],"tags":[73,83,72,90,68,71,69,74],"yoast_head":"\nVDM-7 DiCAP™ VPM-7 SmartPirani™ ATM<\/strong>\u00a0\u4f20\u611f\u5668<\/h2>\n
\n
\u591a\u5408\u4e00\u591a\u4f20\u611f\u5668\u4f20\u611f\u5668<\/a>\u89e3\u51b3\u65b9\u6848<\/span><\/h2>\n
<\/figure>\n<\/div>\n<\/div>\n<\/div>\n<\/section>\n
\u6d4b\u91cf\u548c\u63a7\u5236\u8d1f\u8f7d\u9501\u5b9a\u8fc7\u7a0b<\/span><\/strong><\/h2>\n
<\/div>\n
\u53ef\u9760\u7684\u8bbe\u5b9a\u70b9\u7ee7\u7535\u5668\u63a7\u5236<\/span><\/h2>\n
\u6a21\u62df\u8f93\u51fa<\/span><\/h2>\n
<\/div>\n<\/div>\n<\/div>\n<\/section>\n
<\/div>\n
\u6570\u5b57\u63a5\u53e3<\/span><\/h2>\n
\u8010\u8150\u8680\u4f20\u611f\u5668<\/a><\/span><\/strong><\/h2>\n
<\/div>\n<\/div>\n<\/div>\n<\/section>\n
<\/div>\n
\u5176\u4ed6\u4f9b\u5e94\u5546\u5373\u7528\u517c\u5bb9\u6027<\/span><\/strong>\u00a0<\/span><\/h2>\n
\u81ea\u5b9a\u4e49\u8bbe\u7f6e<\/span><\/strong><\/h2>\n
\u5e94\u7528\u548c\u5e02\u573a<\/span><\/h2>\n